̽ô 27 ũ븮(̱5) ߿ť ķ۽ S ذ ߴٰ .
̳ ذĿ ȫ ϵ , ڴ ڿ å, ȣ ̽, ڱ ȸǿ, 迵 ȸǿ, ̽ȸ , ͱ ̿ ȸ, ǿ Z ȸ, ߿ť ȫ ǥ̻ ȸ ߿ť ķ۽ S ذ ϰ â ߴ.
߿ť 1983 ̿ , ݵü ÷̿ , ݵü ‧ǰ , ÷ Ƿ 4 ϰ , 40Ⱓ ڷ ŵ 忡 ۷ι 1 ߴ.
° Z, SK̴н ݵü TSMC, Intel, Micron ֿ ۷ι ݵü ü LAMResearch, Tokyo Electron ۷ι ü ϰ ִ.
Ư, ߿ť Ͽ 븸, ϰ , ̽ 濡 ݵü Chamber Plasma Density, Etching Gas ȯ ȭ ݵü ǰ Particle, Life time ذϱ ̼‧‧ ñ ߿ ϰ ִ.
̱ 4 ۷ι ̱, 븸, , Ϻ, ߱ 19 ( 5, ̱ 4, 븸 2, 2, Ϻ 4, ߱ 2) ϰ , 2,400 Ȱ ϰ ִ.
ƿ, ް ܺ ȯ ȭ ̷ ݵü з ȯ ϱ Բ M&A ̷ 嵿 Ȯ ִ.
ȣ ̽ 40Ⱓ ̻ܰ Բ , ߿ť ݵü 츮 ̽ð ߽ ϴ ݵü Ưȭ ū ʼ ̴١ ߴ.
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